INESC MN - Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias
INESC MN - Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias

Portugal: Lisbon Metropolitan Area

Overview

INESC Microsistemas e Nanotecnologias is a private, non-profit Research and Development Institute created in January, 2002 from the former Solid State Technology group of INESC which existed since 1992. Since January 2008, INESC MN belongs to the Associated Laboratory - Institute of Nanoscience and Nanotechnology (IN) - to work in the emerging fields of Nanotechnology, BioNanotechnology and Nanosciences.

INESC MN is dedicated to leading edge research and development in strategic technological areas of micro- and nanotechnologies and the application of these technologies to electronic, biological and biomedical devices. INESC-MN research work shares the laboratories and class 100/10 clean room facilities used for student training. An important part of INESC MN’s mission is to provide advanced training at Master, PhD and post-doctoral levels, acting as a bridge between the Technical Engineering School (IST, Universidade de Lisboa) and industrial partners worldwide. INESC-MN also offers transfer of… INESC MN has a Class 10/100 cleanroom (~200 m2) with a Class 10.000 grey area (~200 m2) for support and laboratorial equipment. INESC MN also has an additional 170 m2 of laboratory space for materials and device characterization as well as microfluidic processing.  

A list of the equipment available at INESC MN include:

MATERIALS AND MICRO AND NANOFABRICATION EQUIPMENT

Magnetron sputtering systems (5) – Nordiko 2000; Nordiko 7000; Alcatel; 2 homebuilt systems
Ion Beam Deposition and Milling systems (2) – Nordiko 3000; Nordiko 3600
PECVD systems (3) – Electrotech Delta; Aixtron Black Magic; 1 homebuilt system
Reactive Ion etcher – LAM Rainbow
Optical Lithography – Heidelberg Instr. DWLii
E-beam Lithography – RAITH 150
Photoresist spin coater and developer track – SVG series 88
Plasma cleaner

FILM AND DEVICE CHARACTERIZATION

SEM – Hitachi S-2500
Optical and Fluorescence microscopy (Olympus and Leica)
Nano-spotter (GeSim NP2.1 Nanoplotter)
X-ray diffractometer
…. INESC MN provides cleanroom microfabrication and prototyping services to industry, SMEs, research institutes and university groups both inside Portugal and around the world. The types of services we provide include:

THIN FILM DEPOSITION AND DEVELOPMENT

Magnetic thin films and multilayers
Transparent electronics (ITO, IZO, AZO, SiO2, MgO, TiO2)
Oxide and nitride thin films (SiO2, SiNx, AlN, TaN, MgO, TiO2)
Thin film semiconductors (a-Si:H, nc-Si, alloys with carbon, doped layers)

MATERIALS AND DEVICE CHARACTERIZATION

Magnetic characterization
Optical and optoelectronic characterization
Optical and fluorescence microscopy
Scanning electron microscopy
Profilometry and ellipsometry

DEVICE AND SYSTEM PROTOTYPING

Magneto resistive sensors
Magnetic devices
MEMS
Micro-electrodes
Magnetic surface scanners
Microfluidic devices
Biosensors and Lab on Chip systems
Sensors on CMOS

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Sectors
Automotive - Consumer goods/products - Environment - Agro-food - Electronics - Measurement
Technology
Smart Manufacturing / Industry 4.0 - Robotics / Human machine interaction - Process industry (processing of novel materials, structures, etc.) - Monitoring and control - Intelligent/ sensor-based equipment - Electronic and optical functional materials - High performance materials (strong, light weight, resistant) - Optoelectronics (optical networks, optical sensors) - Power electronics - Printed/flexible electronics - Heterogeneous components & more than Moore (MEMS, NEMS, sensors, transducers) - Nanomedicine - Photodetectors (solar cells, photo-diodes, photo-transistors) - Other
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