Centre for Advanced Surface Processing and Analysis by Vacuum Technologies (ReCAST)
Centre for Advanced Surface Processing and Analysis by Vacuum Technologies (ReCAST)
Overview
The ReCAST activity is mainly related to:
thin film Physical Vapor Deposition (dc, rf, pulsed bipolar magnetron sputtering, cathodic vacuum arc, thermal evaporation) with associated physical characterization methods;
plasma surface treatments;
ultrahigh vacuum (UHV) technologies, including leak detection by mass spectrometry;
ion sources for ion assisted surface processing.
Thin film deposition research activities were developed in the last years especially due to potential applications in material coatings and surface engineering. Ion assisted magnetron sputtering and cathodic vacuum arc were applied and developed preferentially.
Thin films deposition:
Magnetron sputtering units (2 AJA UHV deposition units; Octogon deposition unit)
Cathodic arc deposition unit
Thermal/ Electron beam evaporation unit
Plasma Surface Treatment (Plasma – nitridation unit)
Surface investigation:
Nano SAM Lab S Scanning Auger Microscopy System
Auger Electron Spectroscopy (AES) – Modular PHY system
Scanning Electron Microscope (SEM) with Energy Dispersive X-ray spectrometer (EDX)
X-Ray Diffractometer SmartLab
X-ray Difractometer MiniFlex-II
V-670 UV-Vis/NIR Spectrophotometer
Jasco FT-IR-6300 Fourier Transform Infrared Spectrometer
AFM/STM Microscopy System
Veeco DEKTAK 150 Surface Profilometer
Nanoindenter Hysitron TI Premier
TriboLab UMT Bruker
Hall Measurement System
Contact angle measurement system
VersaSTAT-3 potentiostat/galvanostat
Plasma investigation:
Electrical probes
RF mass spectrometry – with differential pumping
Optical emission spectroscopy (DC and pulsed plasma)
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Service portfolio of measuring and analysis techniques aimed at optimizing of products and production processes;
Development of demonstrators and prototypes, testing demonstrators and prototypes;
Plasma surface treatments;
Service for leak detection by mass spectrometry.
More details:
https://erris.gov.ro/ReCAST-1
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