RENATECH-MIMENTO
RENATECH-MIMENTO
Overview
MIMENTO is the member of French National network in micro & nanotechnologies, called Renatech, coordinated by the CNRS. MIMENTO is also the technology center of FEMTO-ST Institute, located at Besançon, France. MIMENTO is a state-of-the-art facility for micro and nanofabrication facility housed in its 860 m2 clean room, equipped with modern and powerful processing machines.
Mimento is pecialized in micro-nano-acoustics, micro-nano-optics and micro-opto-electro-mechanical systems. The R&D activity at MIMENTO follows the main points described below:
-Technological research: micro- and nano-structures for research in physics, chemistry and biology, microstructures for the characterization of new materials.
-Manufacturing processes: new manufacturing processes in silicon and other materials (lithium niobate, glass, piezolectric materials), new processes for microelectronics, silicon post-processing.
-Integration and encapsulation techniques for microsystems.
The clean room, open to all users, is managed… MIMENTO clean room provides eight working areas:
-photolithography ((laser pattern generator, spray and spin coaters, single & double side aligners),
-thin-film deposition (evaporation, sputtering, piezoelectric deposition cluster, PECVD, thermal oxidation, etc..)
-plasma etching (Silicon DRIE and RIE, quartz & niobate & glass DRIE, different RIEs),
-wet processes (electrodeposition, wet etch for Si, quartz, niobate, metals, etc.., porous silicon, …)
-packaging and 3D integration (wafer bonders,wire-bonder, flip-chip, megasonic cleaner, plasma activation,…)
-dicing and polishing (high precision dicer with cut&polish, wafer polishing)
-nanotechnology (FIB, E-beam lithography)
and
characterization tools.
. We offer:
-the technological service with an open access to the processing equipment available in clean room the the -the research support for E&D and research projects with the most advanced know-how in microtechnology
-the client-oriented advices with identification of relevant technological solutions
-the technological services on demand and
-the on-site training capabilities for users.
The access to the equipment is done via a reservation software with personal ID and password in the clean room. Only people who have followed a training done by staff member can use the equipments. Several industrial partners are directly processing in our clean room. Several industrial boxes are available for renting.
. Yes. service.