NANOLYON
NANOLYON

Overview

The NANOLYON platform is dedicated to Micro and Nanotechnolgoy. It includes 600m² of clean room and 700m² of technological rooms. It is operated by a team of engineers and technicians, corresponding to 16.5 full time employees. It is part of the Lyon Institute of Nanotechnology, a Joint Research Unit of CNRS, Ecole Centrale de Lyon, INSA Lyon, Université Claude Bernard Lyon 1 and CPE Lyon.

The NANOLYON platform is a member of the Renatech+ network, is labialized as a national proximity facility since 2002. It includes high performance, flexible and easily accessible technological equipments. The platform allows to develop the Micro and Nanotechnologies by combining the know-how of communities in Engineering and with existing strengths in Chemistry, Biology, Medicine, Materials Science and Physics. It is the privileged tool which allows to offer to the actors of the fundamental and applied researches a complete set of tools and specific expertise allowing the emergence of original
technology processes.
… The platform is equipped with a wide range of generic and specific equipments, dedicated to Micro and Nanotechnologies. Fabrication tools are dedicated to generation and fabrication of materials, including thin layers and nanostructures, components and devices, sensors, microsystems.
This is completed with design and characterization tools. These technological resources are dedicated to applications in the field of electronics,biotechnologies and photonics.

Equipments include:

• Surface chemistry and wafer cleaning
• Porosification by electrochemical anodization
• UV Photolithography, maskless UV laser lithography, ebeam writing, UV holography
• Epitaxial growth (SSMBE, LPE, VPE)
• Evaporators (thermal, e-beam)
• ALD, PECVD-ECR, multi-electrodes PECVD, LPCVD, reactive sputtering, electrolytic depositions
• Wet etching, RIE, ICP, electrochemistry
• Microimprint, thermoforming, micro-drilling
• Photomasker/synthetisers of DNA chips
• Optical microscopy, SEM, AFM, ellipsometry, XPS, DXRD,…. The platform is a ‘hand-on” facility which develops internal and external projects (exogenous projects) with
technological challenges within the framework of the scientific collaborations including university and/or
industrial partnerships. The platform hosts external partners, including industrials and academics, that use the facilities for their own developments. 

« EASY ACCESS and FLEXIBILITY » : The platform currently develops technological research conducted
in INL (Lyon Institute of Nanotechnology) and supports external projects (academic and industrial R&D community).
« SPECIFIC EXPERTISE » : The technological developments are mainly focusing from standard to
very dedicated process.
Education training offer (400 h/year for projects and practical training – around 160 students)
Visiting users are specifically trained by the technical staff and/or the direct supervisor in the
use of equipment and processes

Our technological offer : to set up classical (litho-deposition-etching) or more…. Yes. service.